Precision V-I-Φ Measurements for Plasma Processes.
BIRD DIAGNOSTIC SYSTEM Inline Voltage & Current Probe
Engineered for RF-driven plasma applications, Bird’s BDS2 V-I-Φ measurement solution delivers real-time voltage, current, phase angle, and impedance across fundamental and harmonic and intermodulation frequencies.
With dynamic impedance tracking and time-synchronized measurement, it provides the visibility needed to optimize match tuning, detect process drift, and stabilize chamber conditions.
Built for the fab floor, it brings metrology-grade performance into live production—so you can control your RF process with clarity and confidence.
Built to Capture the Full RF Signal Spectrum
From sensor to receiver, every component is engineered for high-fidelity V-I and phase measurements—right where plasma and RF meet.
- BDS2 V-I-Φ System: The system consists of a precision V-I sensor head, a compact RF Head, a compact RF receiver module & a high integrity sensor to receiver cable assembly.
- V-I-Φ Sensor with Connectors: 7001B550-1-xxyy The inline sensor with QC connectors captures real-time voltage, current, and phase data directly from the RF path with minimal impact on impedance or RF power delivery. xx=input connector, yy=output connector
- V-I-Φ Sensor with Protruding Dielectric: 7001A550-1-2 This sensor is ideal for installations that require a copper strap or other non-coaxial setups. Sensor captures real-time voltage, current, and phase data directly from the RF path with minimal impact on impedance or RF power delivery.
- BDS2 Receiver: 7001A900-2 The receiver processes the RF signals across fundamental, harmonic and intermodulation frequencies, enabling accurate calculation of power, impedance, and related metrics.
- Calibrated Cable Assembly: 7001B040-5M The cable is optimized for phase stability and shielding to preserve signal fidelity between sensor and receiver—ensuring reliable, high-speed data acquisition in demanding plasma environments.
- BDS-2 for AMAT Producer CVD Systems: 70010A660 Sensor. P-CVD System consists of a custom designed drop in V-I sensor for applied materials Producer P-CVD tools, a high compact receiver module and a high-integrity sensor-to-receiver cable assembly. Datasheet