50 Ohms Inline RF Sensors

When accuracy is critical, Bird’s Precision CW and Pulsed RF Sensors deliver. Built for semiconductor fabs, test labs, and precision manufacturing, they combine metrology-grade performance with real-world durability and easy integration.

With accuracy options of ±3%, ±1%, or ±0.5%, each sensor is NIST-traceable and supports both CW and pulsed signals. Advanced features like gated time-domain analysis and microsecond-level resolution give you the flexibility and confidence to handle today’s calibration demands, and tomorrow’s.

Two Sensor Families. One Standard of Trust. 1. Pulsed & CW RF Sensors

For engineers working with, or moving toward, more complex RF waveforms, Bird’s CW + Pulsed sensor family provides the added flexibility to handle dynamic signals with confidence. These sensors bring advanced measurement capabilities like time-domain analysis and pulse insight, helping you stay ahead of process changes while protecting your long-term investment.

2. CW-only RF Sensors

Bird’s CW-only sensors are the trusted standard for straightforward, high-accuracy RF power measurements in stable, continuous-wave applications. Perfect for fabs running fixed-frequency or frequency-agile tools, these sensors deliver consistent, repeatable performance with the simplicity and ruggedness you need for everyday calibration and monitoring.

Compare. Choose. Calibrate.

Use this quick-reference guide to select the sensor that meets your fab’s performance and future-proofing goals.

Model Series	Accuracy	Signal Type	Key Features	Best For	Learn More
7037/7039	±0.5% across entire power range	CW and Multi-State Pulsed RF Power	NIST-traceable, 4-level pulsed waveforms, Average & gated power measurements, Time-domain, 1 µs pulse resolution, SCPI automation	High-precision etch and deposition applications, metrology labs.	7037/7039 sensors info
7027/7029	±1.0% across entire power range	CW and Multi-State Pulsed RF Power	NIST-traceable, 4-level pulsed waveforms, Average & gated power measurements, Time-domain, 1 µs pulse resolution, SCPI automation	Semiconductor fabs, tool calibration and process control	7027/7029 sensor info
4027A/4027F	±1.0% at 1700 W ±2.0% across other power levels	CW Only	Simple, accurate CW measurements, optimised for ISM/fab frequencies	Calibration of CW RF sources.	4027 sensors info
4028	±2.0% at 1700 W, ±3.0% across other power levels	CW Only	Simple, accurate CW measurements, Designed for high-power ISM/fab frequencies	Calibration of high power RF sources for plasma process control and equipment qualification	4028 sensor info
4020	±3.0% across entire power range	CW Only	Rugged design, Easy operation, Broad frequency range	Routine fab RF power supply checks, maintenance, field use, or cost-sensitive lab setups	4020 sensor info